Scope of the Conference
Photon Lithography
DUV, 193nm immersion, 157 nm immersion, EUV, sources, optics, systems,
alignment, optical proximity correction, lithography modeling, novel
techniques.
Electron and Ion Beam Lithography
Sources, optics, systems, alignment, e-beam proximity correction, e-beam
mask writer, ion beam surface interactions, gas assisted ion beam etching
and deposition.
Nanoimprint Lithography &
Technology
Systems, alignment, nano-imprint methods, results and applications, stamps
fabrication.
Mask Technology
Masks for photon-based and charged-particle lithography, accuracy, line
width control, contamination, damage, inspection and repair.
Mask-less Lithography
Phton, charged-particle, proximity probe based techniques. Sources, optics,
systems, alignment, modeling, throughput.
Resists and Resist Processing
Materials, thin films, multilayer and inorganic resists, antireflective
coatings, surface imaging, conductive films, chemical amplifications, wet
and dry processing, characterization, modeling of exposure and development.
Pattern Transfer
Dry etching, beam-assisted etching and deposition, etch damage, lift-off,
plating, implantation, sputtering, sources and reactors, pattern transfer
modeling.
Microsystems and their Fabrication
Surface and bulk micro-machining, 3D structures, new materials, sensors and
actuators, micro (opto) electro-mechanical devices – M(O)EMS,
microfluidics.
RF-MEMS/NEMS
Micro-and nano-electromechanical passive devices, RF micro- and
nano-mechanical resonators, M/NEMS-based RF systems, integrated
RF-MEMS/NEMS.
Nanoscale Engineering &
Fabrication
Novel fabrication methods, limits of miniaturization, self-assembling and
self-organising systems, scanning probe techniques, nanomechanics,
nanofluidics, measurements/characterization, modeling at the nanoscale.
Nanodevices
Nanoelectronics, nanomechanical devices, nanooptics/nanophotonics,
nanomagnetics, data storage, carbon nanotube devices, molecular devices,
characterization and applications.
Micro- & nano-systems for
Biology
Bio-MEMS, lab-on-a-chip, bio(medical)devices, micro total-analysis systems,
micro-and nanofluidic biodevices.
Process Diagnostics & Control
Inspection, testing, modification, metrology and in-situ measurements of
processes, devices and circuits.